M-011 Ultra-High Precision Stages with Magnetic-Kinematic Bearings
See "Accessories", for adapters, brackets, etc.
ORDERING INFORMATION:
M-011.00 Translation Stage, 15 mm
M-011.P0 Translation Stage, 15 mm, Manual + PZT Drive
M-011.PS Translation Stage, 15 mm, Manual + Closed Loop PZT Drive
M-011.D0 Translation Stage, 10 mm, DC Motor Drive
M-011.DP Translation Stage, 10 mm, DC Motor + PZT Drive
M-011.DS Translation Stage, 10 mm, DC Motor + Closed Loop PZT Drive
UPGRADES:
M-011.U0 Upgrade Kit with Open Loop PZT Drive
M-011.US Upgrade Kit with Closed Loop PZT Drive
M-011.UD Factory Installed Upgrade Kit with DC Motor Drive and Limit Switches
| TECHNICAL DATA: | ||||||||
|
Models |
M-011.00 |
M-011.P0 |
M-011.PS |
M-011.D0 |
M-011.DP |
M-011.DS |
Units |
|
|
Travel range |
15 |
15 |
15 |
10 |
10 |
10 |
mm |
|
|
PZT fine travel range |
- |
30 |
30 |
- |
30 |
30 |
µm |
|
|
Min. incremental motion |
- |
0.005 |
0.005 |
- |
0.005 |
0.005 |
µm |
A4 |
|
Repeatability (PZT drive) |
- |
- |
0.06 |
- |
- |
0.06 |
µm |
|
|
Design resolution (DC Motor) |
- |
- |
- |
0.059 |
0.059 |
0.059 |
µm |
A3 |
|
Min. incremental motion |
1 |
1 |
1 |
0.1 |
0.1 |
0.1 |
µm |
A4 |
|
Unidirectional repeatability |
- |
- |
- |
0.1 |
0.1 |
0.1 |
µm |
|
|
Bi-directional repeatability |
- |
- |
- |
5 |
5 |
5 |
µm |
|
|
** Backlash |
- |
- |
- |
5* |
5* |
5* |
µm |
|
|
Straightness/ flatness per 5 mm |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
µm |
|
|
Straightness/ flatness full travel |
0.2 |
0.2 |
0.2 |
0.2 |
0.2 |
0.2 |
µm |
|
|
Max. velocity |
- |
- |
- |
0.7 |
0.7 |
0.7 |
mm/sec |
|
|
Max. normal load capacity |
1 |
1 |
1 |
1 |
1 |
1 |
kg |
B1 |
|
Max. push/pull force |
7 / 5 |
7 / 5 |
7 / 5 |
7 / 5 |
7 / 5 |
7 / 5 |
N |
B2 |
|
Max. lateral force |
5 |
5 |
5 |
5 |
5 |
5 |
N |
|
|
Drive |
M-623 Micrometer |
M-623 Micrometer |
M-623 Micrometer |
M-222.20 |
M-222.20 |
M-222.20 |
||
|
PZT Drive |
- |
P-840.20 |
P-841.20 |
- |
P-840.20 |
P-841.20 |
D1 |
|
|
Encoder resolution |
- |
- |
- |
60 |
60 |
60 |
counts/rev. |
|
|
Drive screw pitch |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
mm/rev. |
|
|
Gear ratio |
- |
- |
- |
(31/9)4 :1 |
(31/9)4 :1 |
(31/9)4 :1 |
||
|
Nominal motor power |
- |
- |
- |
2 |
2 |
2 |
W |
|
|
Motor voltage range |
- |
- |
- |
0 to ±12 |
0 to ±12 |
0 to ±12 |
V |
|
|
Weight |
0.35 |
0.4 |
0.42 |
0.55 |
0.6 |
0.62 |
kg |
|
|
Recommended motor controller |
- |
- |
- |
C-842, C-844 |
C-842, C-844 |
C-842, C-844 |
D2 |
|
|
Material |
Al, St |
Al, St |
Al, St |
Al, St |
Al, St |
Al, St |
L |
|
|
Recommended PZT controller |
- |
A, C, G |
D, H |
- |
A, C, G |
D, H |
M |
|
* gearhead ** the PZT drives are backlash free
