M-500 Series Low Profile High Resolution Translation Stages
See "Accessories", for adapters, brackets, etc.
ORDERING INFORMATION:
M-511.DG Translation Stage, 4", DC Motor/ Gearhead
M-511.DD Translation Stage, 4", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-511.DDB Translation Stage, 4", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-511.5S Translation Stage, 4", 5 Phase Stepper Motor
M-521.DG Translation Stage, 8", DC Motor/ Gearhead
M-521.DD Translation Stage, 8", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-521.DDB Translation Stage, 8", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-521.5S Translation Stage, 8", 5 Phase Stepper Motor
M-531.DG Translation Stage, 12", DC Motor/Gearhead
M-531.DD Translation Stage, 12", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-531.DDB Translation Stage, 12", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-531.5S Translation Stage, 12", 5 Phase Stepper Motor
OPTIONS:
M-500.90 Linear and Guiding Accuracy Interferometric Test Sheet for M-500 Stages
M-590.00 Three-Point Support
M-592.10 Z-axis Mounting Bracket for Vertical Mount of M-500 Series Stages
M-500.PS Power Supply for M-5x1.DD (included in M-5x1.DD)
| TECHNICAL DATA: | |||||||||||
|
Models |
M-511.DD |
M-511.DG |
M-511.5S |
M-521.DD |
M-521.DG |
M-521.5S |
M-531.DD |
M-531.DG |
M-531.5S |
Units |
|
|
Travel range |
102 |
102 |
102 |
204 |
204 |
204 |
306 |
306 |
306 |
mm |
|
|
Design resolution |
0.1 |
0.033 |
1 |
0.1 |
0.033 |
1 |
0.1 |
0.033 |
1 |
µm |
A3 |
|
Min. incremental motion |
0.1 |
0.1 |
1 |
0.1 |
0.1 |
1 |
0.1 |
0.1 |
1 |
µm |
A4 |
|
Unidirectional repeatability |
0.1 |
0.2 |
0.2 |
0.1 |
0.2 |
0.2 |
0.1 |
0.2 |
0.2 |
µm |
|
|
Bi-directional repeatability |
0.2 |
1 |
0.5 |
0.2 |
1 |
0.5 |
0.2 |
1 |
0.5 |
µm |
|
|
Origin repeatability |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
µm |
|
|
Backlash |
- |
1 |
0.5 |
- |
1 |
0.5 |
- |
1 |
0.5 |
µm |
|
|
Accuracy |
0.2 |
2 |
2 |
0.2 |
2 |
2 |
0.2 |
2 |
2 |
µm |
|
|
Straightness / flatness per 100 mm |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
1 |
µm |
|
|
Max. velocity |
50 |
6 |
24 |
50 |
6 |
24 |
50 |
6 |
24 |
mm/sec |
|
|
Max. normal load capacity |
100 |
100 |
100 |
100 |
100 |
100 |
100 |
100 |
100 |
kg |
B1 |
|
Max. push/ |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
80 / 80 |
N |
B2 |
|
Max. lateral force |
200 |
200 |
200 |
200 |
200 |
200 |
200 |
200 |
200 |
N |
|
|
Encoder resolution |
0.1 µm * |
2048 |
- |
0.1 µm * |
2048 |
- |
0.1 µm * |
2048 |
counts/rev. |
||
|
Motor resolution |
- |
- |
2000 |
- |
- |
2000 |
- |
- |
2000 |
steps/rev. |
|
|
Ballscrew pitch |
2 |
2 |
2 |
2 |
2 |
2 |
2 |
2 |
2 |
mm/rev. |
|
|
Gear ratio |
- |
(28/12)4 : 1 » 29.6:1 |
- |
- |
(28/12)4 : 1 » 29.6:1 |
- |
- |
(28/12)4 : 1 » 29.6:1 |
- |
||
|
Nominal motor power |
30 |
3 |
- ** |
30 |
3 |
- ** |
30 |
3 |
- ** |
W |
|
|
Motor voltage |
0 to ± 24 |
0 to ±12 |
24 ** |
0 to ± 24 |
0 to ±12 |
24 ** |
0 to ± 24 |
0 to ±12 |
24 ** |
V |
|
|
Weight |
5.0 |
4.9 |
4.9 |
6.1 |
6.0 |
6.0 |
7.2 |
7.1 |
7.1 |
kg |
|
|
Material |
Al |
Al |
Al |
Al |
Al |
Al |
Al |
Al |
Al |
L |
|
|
Recommended motor controller |
C-842***, |
C-842, |
- |
C-842***, |
C-842, |
- |
C-842***, |
C-842, |
- |
D2 |
|
* Linear encoder
** 24 V chopper voltage, 0.5 A / phase, 8 ohms / phase
*** C-842.xxB if ordered with Brake Option (Models M-5xx.DDB)
