Micropositioners Selection Guide

Translation Stages

TRANSLATION STAGES SELECTION GUIDE

Models

Load Capacity [kg]

Travel Ranges [mm]

Drive Options

Notes

M-300

4

6

manual / PiezoMike

smallest stage

M-105/106

10

5, 18

manual / PiezoMike

crossed roller bearings

M-011

1

15

manual / DC servo / PZT fine range

low profile, very straight and smooth motion

M-014

5

25

manual / DC servo / PZT fine range

low profile, very straight and smooth motion, clear aperture

M-126

20

25

DC servo / manual

crossed roller bearings

M-400

50

50, 100, 150

DC servo / stepper

crossed roller bearings

M-510

100

100

DC servo / stepper

compact design, recirculating ballscrew

M-500

100

102, 204, 306

DC servo / stepper

direct output metrology for highest accuracy

Linear Actuators and Micrometers

LINEAR ACTUATOR AND MICROMETER SELECTION GUIDE

Models

Load Capacity [kg]

Travel Ranges [mm]

Drive

Notes

M-222/224/226

5

10, 25, 50

DC servo

compact, high resolution, non rotating tip, excellent repeatability

M-168

5

10, 25, 50

5 phase stepper

compact, high resolution, non rotating tip, excellent repeatability

P-853/854

1

6, 18

PiezoMike

sub-nanometer resolution

M-631/632/633

10

10, 25, 50

manual micrometer

non rotating tip, compact, excellent repeatability

M-619 - M-626

2-5

6, 10, 15, 18, 25

manual micrometer

low friction, compact

M-653/655

2

6, 20

differential micrometer

0.1 µm resolution, compact

Rotation Stages and Tilt Stages

ROTATION STAGE AND TILT STAGE SELECTION GUIDE

Models

Load Capacity [kg]

Rotation Range [deg]

Drive Options

Notes

M-035 (1)
M-035 (2)

30

±9.5

manual / DC servo / PZT fine range

compact, clear aperture, high resolution

M-036 (1)
M-036 (2)

40

±10.5

manual / DC servo / PZT fine range

clear aperture, high resolution

M-037

30

continuous

manual / DC servo / stepper

compact, clear aperture, high resolution

M-038

40

continuous

manual / DC servo / stepper

clear aperture, high resolution

M-041

4

± 9

manual / DC servo / PZT fine range

compact, high resolution

M-042

4

± 9 (qX, qY)

manual / DC servo / PZT fine range

compact, high resolution

M-043

5

± 7

manual / DC servo / PZT fine range

high resolution

M-044

5

± 7 (qX, qY)

manual / DC servo / PZT fine range

high resolution

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