M-041 - M-044 Tilt Stages
See "Accessories", for adapters, brackets, etc.ORDERING INFORMATION:
M-041.00 Small Tilt Stage, qX, Manual Micrometer Drive
M-041.D0 Small Tilt Stage, qX, DC Motor Drive
M-042.00 Small Tilt Stage, qX qY, Manual Micrometer Drive
M-042.D0 Small Tilt Stage, qX, qY, DC Motor Drive
M-043.00 Tilt Stage, qX, Manual Micrometer Drive
M-043.D0 Tilt Stage, qX, DC Motor Drive
M-044.00 Tilt Stage, qX qY, Manual Micrometer Drive
M-044.D0 Tilt Stage, qX qY, DC Motor Drive
UPGRADES:
M-041.U0 Open Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-041.US Closed Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-042.U0 Open Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-042.US Closed Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-043.U0 Open Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-043.US Closed Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-044.U0 Open Loop PZT Drive Upgrade Kit for M-044 Tilt Stages
M-044.US Closed Loop PZT Drive Upgrade Kit for M-044 Tilt Stages
* the PZT drives are backlash free
TECHNICAL DATA: Models
M-041.00
M-042.00
M-043.00
M-044.00
M-041.D0
M-042.D0
M-043.D0
M-044.D0
Units
Tilt Axes
q X
q Xq Y
q X
q Xq Y
q X
q Xq Y
q X
q Xq Y
Tilt Range
± 9
± 9
± 7
± 7
± 9
± 9
± 7
± 7
deg (axis)
Fine Range
(PZT option)±1.2
±0.6
±1.4
±1.4
±1.2
±0.6
±1.4
±1.4
mrad (axis)
Design resolution
-
-
-
-
4.7
4.7
3.8
3.8
µrad
A3
Min. incremental motion
80
80
65
65
15
15
12
12
µrad
A4
Min. incremental motion (PZT option)
0.5
0.5
0.5
0.5
0.5
0.5
0.5
0.5
µrad
A4
Rotation / linear input
80
80
65
65
80
80
65
65
µrad / µm
A5
Unidirectional repeatability
-
-
-
-
20
20
15
15
µrad
* Backlash
-
-
-
-
400
400
350
350
µrad
Max. velocity
-
-
-
-
3.2
3.2
2.6
2.6
deg/sec
Max. load (A)
4
4
5
5
4
4
5
5
kg
Max torque (B, C)
450, 150
450, 150
750, 250
750, 250
450, 150
450, 150
750, 250
750, 250
mNm
Drive
M-622 Micrometer
M-622 Micrometer
M-624 Micrometer
M-624 Micrometer
M-222.20 DC-Mike
M-222.20 DC-Mike
M-222.20 DC-Mike
M-222.20 DC-Mike
PZT drive (optional)
P-840.20 /
P-841.20P-840.10 /
P-841.10P-840.30 /
P-841.30P-840.30 /
P-841.30P-840.20 /
P-841.20P-840.10 /
P-841.10P-840.30 /
P-841.30P-840.30 /
P-841.30D1
Weight
0.4
0.6
0.8
1.2
0.5
0.7
0.9
1.5
kg
Material
Al
Al
Al
Al
Al
Al
Al
Al
L