M-168 High Resolution Stepper-Mike Actuators

M-168.10, M-168.30, M-168.40 Stepper-Mikes

• 10, 25 & 50 mm Travel Ranges
• Resolution 0.25 µm
• 5 Phase Stepper Motor
• Manual Positioning Knob
• Sub-nm Resolution with Optional PZT Actuator

M-168 are compact high resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. They consist of a micrometer drive with non-rotating tip driven by a 2000 half step/revolution 5-phase stepper motor. Compared to conventional rotating tip micrometer drives the non-rotating tip design offers the following advantages:

• elimination of torque-based stage platform tilting
• elimination of wear at the contact point
• elimination of tip angle dependent wobble

M-168 Stepper-Mikes feature an extremely low stiction/friction construction allowing for high resolution and repeatability. A manual positioning knob provides coarse resolution of 5 µm. All models come with standard flat tips (click here for spherical tips and other options).

An optional piezo tip provides 20 µm travel with sub-nanometer resolution for dynamic scanning and tracking (click here).

For mounting, the Stepper-Mikes are clamped around the 19 mm diameter. Clamping around the 16 mm diameter sleeve should only have a supporting function; high forces at this point will increase friction and reduce accuracy and resolution. For the same reason lateral forces on the tip must be avoided.