P-853.00, P-854.00 PiezoMike the Piezoelectric Micrometer Drive

P-853 (left) P-854 (right)

M-313.80 XYZ miniature stage with P-853 PiezoMikes

• Alternative for Standard Micrometer Drives
• Manual Travel to 18 mm
• Piezoelectric High Resolution Travel 30 µm
• Resolution in the nm Range
• Dynamic Operation to 10 Hz

P-853/P-854 PiezoMikes are micrometer drives with integrated high resolution piezo linear drives. They can be manually operated like standard micrometer drives. Sensitivity of the micrometer is 1 µm. By controlling the PZT voltage, the micrometer tip is automatically moved in and out (up to 30 µm) relative to the manually set position. Resolution of the piezoelectric motion is in the nanometer range. The PiezoMike can therefore be used as a remotely controlled fine positioning element.

Working principle:
A sophisticated wire EDM (Electric Discharge Machining) flexure motion amplifier doubles the displacement of a 15 µm piezo linear actuator to 30 µm. It also serves as a linear guide to the micrometer drive which is moved back and forth when the PZT drive voltage is changed. This design is compact and mechanically stable.

PiezoMike Applications

The PiezoMike can be mounted like a micrometer drive by clamping around the flange.

P-853.00 is equipped with a 6 mm holding flange and can be directly attached to M-311 Miniature Translation Stages (click here). The P-854 can be attached to the M-105 linear positioners (click here).