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S-310 - S-316 Ultra-Fast Multi-Axis Tilt Platforms and Z Positioners

S-310 to S-316 Multi-Axis Tip/Tilt Platforms and Z-Positioners are fast and compact units based on the Triple Piezo Drive Supported Platform design (click here for details and equations). They offer piston movement to 12 µm and tilt movement to ± 600 µrad with sub-msec response and settling. S-310 to S-316 systems are designed for mirrors and optics up to 25 mm diameter; the clear aperture is ideal for transmitted light applications. The units can be mounted in any orientation.

In open loop operation, the vertical position/platform angle roughly corresponds to the drive voltage (see "Tutorial: Piezoelectrics in Positioning" section for behavior of open loop piezos). The S-310 to S-315 open loop models are ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e.g. quad cell, CCD chip, ...). The S-316.10 closed loop version allows absolute position control, high linearity and repeatability based on the internal ultra-high resolution feedback sensor.

Application examples:
Image stabilization, interferometric surface structure analysis, laser cavity tuning, laser beam stabilization, laser beam steering & scanning.

Working principle:
S-310 to S-316 Tilt Platforms are equipped with three low voltage (0 to 100 V) piezoelectric linear drives (click here for details and equations).

Three different versions are available:

open loop Z-actuator; all three piezo linear actuators are electrically connected in parallel, providing vertical positioning (piston movement) of the top ring. Only one drive channel is required.

as S-310.10 but twice the travel range.

open loop Z, tip/tilt positioner; all three piezo linear actuators can be driven individually (or in parallel) by a three channel amplifier. Vertical (piston movement) positioning and tip/tilt positioning is possible.

as S-311.10 but twice the tip/tilt and piston travel range.

closed loop Z, tip/tilt positioner. All three piezo linear actuators are equipped with strain gauge position feedback sensors and can be driven individually (or in parallel) by a three channel amplifier/ position servo controller. Vertical positioning (piston movement) and tip/tilt positioning is possible. The integrated position feedback sensors provide sub-µrad resolution and repeatability (with PI control electronics).

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