S-310 - S-316 Ultra-Fast Multi-Axis Tilt Platforms and Z Positioners
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
ORDERING INFORMATION:
S-310.10 Vertical Piezo Positioner with Clear Aperture, 6 µm
S-311.10 Multi-Axis Piezo Tilt Platform with Clear Aperture, ± 300 µrad, 6 µm
S-314.10 Vertical Piezo Positioner with Clear Aperture, 12 µm
S-315.10 Multi-Axis Piezo Tilt Platform with Clear Aperture, ± 600 µrad, 12 µm
S-316.10 Multi-Axis Piezo Tilt Platform with Clear Aperture, ± 600 µrad, 12 µm, SG Sensors
| TECHNICAL DATA: | ||||||||
| Models | S-310.10
|
S-314.10 | S-311.10
|
S-315.10 | S-316.10 | Units | Notes
|
|
| Active axes | Z | Z | Z,q X, q Y | Z,q X, q Y | Z,q X, q Y | |||
| Open loop tilt angle @ 0 to 100 V | - | - | ± 300
|
± 600 | ± 600 | µrad ± 20 % | ||
| * Closed loop tilt angle ³ | - | - | - | - | ± 600 | µrad | A3 | |
| Open loop linear travel @ 0 to 100 V | 6
|
12 | 6
|
12 | 12 | µm ± 20 % | A5 | |
| Closed loop linear travel ³ | - | - | - | - | 12 | µm | A6 | |
| Integrated feedback sensor | - | - | - | - | 3 x strain gauge | B | ||
| Closed loop *** angular resolution £ | -
|
- | -
|
- | ± 0.05 | µrad | C1 | |
| Closed / open loop *** linear resolution £ | - / 0.1
|
- / 0.2 | - / 0.1
|
- / 0.2 | 0.4 / 0.2 | nm | C1 | |
| Stiffness (Z) | 20
|
10 | 20
|
10 | 10 | N/µm ± 20 % | D1 | |
| Electrical capacitance | 0.7
|
1.4 | 3 x 0.23
|
3 x 0.45 | 3 x 0.45 | µF ± 20 % | F1 | |
| ** Dynamic operating current coefficient (DOCC) | 15 | 15 | 3 x 5
|
3 x 5 | 3 x 5 | µA/(Hz x µm) | F2 | |
| Unloaded resonant frequency (f0) | 9.5
|
5.5 | 9.5
|
5.5 | 5.5 | kHz ± 20 % | G2 | |
| Resonant frequency w/ Æ 15 x 4 mm glass mirror | 6.5
|
4.4 | 5.5
|
4.1 | 4.1 | kHz ± 20 % | G3 | |
| Resonant frequency w/ Æ 20 x 4 mm glass mirror | 6.1
|
4.2 | 4.4
|
3.4 | 3.4 | kHz ± 20 % | G3 | |
| Distance pivot point to platform surface (T) | -
|
- | 5
|
5 | 5 | mm | ||
| Platform moment of inertia | - | - | 150 | 150 | 150 | gmm² | ||
| Operating temperature range | - 20 to 80 | - 20 to 80 | - 20 to 80 | - 20 to 80 | - 20 to 80 | ° C | H2 | |
| Voltage connection | 1 x VL, 2 m cable | 1 x VL, 2 m cable | 3 x VL, 2 m cable | 3 x VL, 2 m cable | 3 x VL, 2 m cable | J1 | ||
| Sensor connection | - | - | -
|
- | 3 x L, 2 m cable | J2 | ||
| Weight (w/o cables) | 45 | 55 | 45
|
55 | 55 | g ± 5 % | ||
| Material (case / platform) | N-S / N-S | N-S / N-S | N-S / N-S
|
N-S / N-S | N-S / N-S | L | ||
| Recommended Amplifier/Controller | G, C
|
G, C | G, C
|
G, C | H, D | M | ||
* For maximum tilt range, all three piezo actuators must be biased at 50 V. Linear travel and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion. See Triple Piezo Drive Tilt Platform equation on page 3.5 for more information.
** Dynamic Operating Current Coefficient in µA per Hertz and mm (per actuator). Example S-314.10: Sinusoidal scan of 10 mm at 10 Hz requires approximately 1.5 mA drive current. For tilt calculation, calculate power requirement for the individual actuators and use Triple Piezo Drive Tilt Platform equation on page 3.5.
*** Noise equivalent motion with E-503 amplifier.
