P-730, P-731 XY Piezo Flexure NanoPositioners and Scanners

Ordering Information:
P-730.40 XY PZT Flexure Stage, 40 x 40 µm
P-730.4L XY PZT Flexure Stage, 40 x 40 µm, LVDT Sensor
P-730.4C XY PZT Flexure Stage, 40 x 40 µm, Capacitive Sensor
P-731.80 XY PZT Flexure Stage, 80 x 80 µm
P-731.8L XY PZT Flexure Stage, 80 x 80 µm, LVDT Sensor
P-731.8C XY PZT Flexure Stage, 80 x 80 µm, Capacitive Sensor

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:
Models	P-730.40	P-730.4L	P-730.4C	P-731.80	P-731.8L	P-731.8C	Units	Notes
Active axes	X,Y	X,Y	X,Y	X,Y	X,Y	X,Y
Open loop travel @ 0 to 100 V	40 x 40	40 x 40	40 x 40	80 x 80	80 x 80	80 x 80	µm ± 20 %	A2
Closed loop travel ³	-	40 x 40	40 x 40	-	80 x 80	80 x 80	µm	A5
Integrated feedback sensor	-	2 x LVDT	2 x Capacitive	-	2 x LVDT	2 x Capacitive		B
Closed / open loop ** resolution £	- / 0.5	10 / 0.5	0.5 / 0.5	- / 1	10 / 1	1 / 1	nm	C1
Closed loop linearity (typ.)	-	0.1	0.03	-	0.1	0.03	%
Full range repeatability (typ.)	-	±20	±3	-	±20	±5	nm	C3
Stiffness	3	3	3	3	3	3	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	300 / 100	300 / 100	300 / 100	300 / 100	300 / 100	300 / 100	N	D3
Max. (+/-) normal load	2	2	2	2	2	2	kg	D4
Tilt (Q X/Q Y) (typ.)	25/25	25/25	25/25	25/25	25/25	25/25	µrad	E1
Electrical capacitance	1.8 / axis	1.8 / axis	1.8 / axis	7.2 / axis	7.2 / axis	7.2 / axis	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	4.5 / axis	4.5 / axis	4.5 / axis	9 / axis	9 / axis	9 / axis	µA/(Hz x µm)	F2
Unloaded resonant frequency	500	500	500	500	500	500	Hz ± 20 %	G2
Resonant frequency @ 200 g load	400	400	400	400	400	400	Hz ± 20 %	G3
Resonant frequency @ 500 g load	250	250	250	250	250	250	Hz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	2 x VL	2 x VL	2 x VL	2 x VL	2 x VL	2 x VL		J1
Sensor connection		2 x L	4 x C		2 x L	4 x C		J2
Weight (with cables)	550	580	580	550	580	580	g ± 5 %
Body material	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller	G, C	H, E	H, L, F	G, C	H, E	H, L, F		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example P-731: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.7 mA drive current.

** Noise equivalent motion with E-503 amplifier.