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P-500 Series of Multi-Axis Piezo Flexure NanoPositioners and Scanners

• Precision Trajectory Control
• 1 to 6 Axis Versions
• Travel Ranges to 200 mm (per axis)
• Clear Aperture to 66 x 66 mm
• Integrated Capacitive Displacement Sensors
• Optional Active Error Compensation for Enhanced Trajectory Control

P-500 series positioners are low profile, high resolution, piezoelectrically driven multi-axis Flexure Stages providing motion in up to 6 degrees of freedom. Linear travel ranges to 200 x 200 x 20 µm and rotation ranges to ± 2 mrad are available. The 66 x 66 mm clear aperture is ideal for transmitted light applications. The low costs and versatility of the P-500 stages are made possible by its unique modular design concept.

State-of-the-art trajectory control is achieved by the P-527.6C. This stage incorporates 6 axis active error compensation to force sub-nm and sub-µrad straightness and flatness (ask for separate information).

Application examples:
Metrology, lithography, nanopositioning, scanning microscopy, disk drive testing, optics, laser-technology, micro-manufacturing

Working principle:
Low voltage PZTs (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nm resolution and stability in closed loop operation (with PI electronics).