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P-762 Family of Piezo Flexure NanoPositioners and Scanners

P-762 series Piezo Flexure Stages are our smallest sensor equipped multi-axis flexure positioners and scanners. The following versions are available: X,   Z,  X-Y,   X-Y-Z,   Z-QX-QY and X-Y-Z-QX-QY.

All versions but the Z and X-Y-Z versions have a 20 x 20 mm clear aperture. The X-Y model consists of an X module and a slightly modified Y module. The Z-module is equipped with 3 Piezo stacks located on the corners of a triangle. The stacks are selected for equal displacement and electrically connected in parallel. A displacement sensor, mounted in the center of the triangle provides optimum stability. The Z-QX-QY module allows individual control of all three PZTs. The displacement is measured by three sensors. See equation in "Technical Drawings " for tip and tilt calculation. The X-Y-Z version consists of an X-Y module stacked together with a Z module. The X-Y-Z-QX-QY version consists of the X-Y module and the Z-QX-QY module.

Application examples:
ntegrated optics, fiber alignment, semiconductor test equipment, scanning interferometry, disk drive testing, surface structure analysis, confocal microscopy, bio-technology, micromanipulation.

Working principle:
P-762 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide nanometer scale resolution and stability in closed loop operation (with PI electronics).

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