Piezo Flexure NanoPositioners & Scanners Selection Guide

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Piezo Flexure NanoPositioners & Scanners Selection Guide

SELECTION GUIDE

Models Axes Travel Ranges [µm] Closed Loop
Versions / Sensor Notes

P-720, P-721 Z 100 yes / capacitive, LVDT microscope objective positioner

P-722, P-723 Z 200, 350 yes / LVDT microscope objective positioner

P-780 X 80 yes / LVDT compact, fast, for small loads

P-752 X 15, 30 yes / capacitive extremely fast and accurate, for disk drive test set ups

P-753 Z & X 12, 15, 38 yes / capacitive very small and accurate, works as both stage and linear actuator

P-750 X 75 yes / capacitive, LVDT extremely straight motion, very stiff

P-730, P-731 XY 50, 100 yes / capacitive, LVDT fast and accurate XY positioner, clear aperture

P-770 XY 200 yes / LVDT 200 x 200 mm clear aperture

P-500 series XY, XYZ, XYq_Z, Zq_Xq_Y 100, 200 (X,Y); 20, 50, 100, 200 (Z),
rotation up to 2 mrad ) yes / capacitive clear aperture, active trajectory control, special version with 6 degrees of freedom

P-762 series X, XY, XYZ, Z, Zq_Xq_Y,Zq_Xq_Y, XYZq_Xq_Y 100, ± 2.6 mrad yes / LVDT compact, 20 x 20 mm clear aperture

P-280 X 30, 50, 100 no low cost, XY and XYZ combinations

P-281, P-282 XY, XYZ 30, 50, 100 no low cost

P-287 Z, q_X 700, 12 mrad no large travel range

P-290 Z 1000 no large travel range

SELECTION GUIDE
Models	Axes	Travel Ranges [µm]	Closed Loop Versions / Sensor	Notes
P-720, P-721	Z	100	yes / capacitive, LVDT	microscope objective positioner
P-722, P-723	Z	200, 350	yes / LVDT	microscope objective positioner
P-780	X	80	yes / LVDT	compact, fast, for small loads
P-752	X	15, 30	yes / capacitive	extremely fast and accurate, for disk drive test set ups
P-753	Z & X	12, 15, 38	yes / capacitive	very small and accurate, works as both stage and linear actuator
P-750	X	75	yes / capacitive, LVDT	extremely straight motion, very stiff
P-730, P-731	XY	50, 100	yes / capacitive, LVDT	fast and accurate XY positioner, clear aperture
P-770	XY	200	yes / LVDT	200 x 200 mm clear aperture
P-500 series	XY, XYZ, XYq_Z, Zq_Xq_Y	100, 200 (X,Y); 20, 50, 100, 200 (Z), rotation up to 2 mrad )	yes / capacitive	clear aperture, active trajectory control, special version with 6 degrees of freedom
P-762 series	X, XY, XYZ, Z, Zq_Xq_Y,Zq_Xq_Y, XYZq_Xq_Y	100, ± 2.6 mrad	yes / LVDT	compact, 20 x 20 mm clear aperture
P-280	X	30, 50, 100	no	low cost, XY and XYZ combinations
P-281, P-282	XY, XYZ	30, 50, 100	no	low cost
P-287	Z, q_X	700, 12 mrad	no	large travel range
P-290	Z	1000	no	large travel range