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P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner
- Precision Trajectory Control
- For XY Scanning and Positioning
- 200 x 200 mm Clear Aperture
- 200 x 200 µm Range
- Resolution < 10 nm
The 200 x 200 mm clear aperture is ideal for all transmitted light applications such as mask alignment.
Application examples:
Metrology, nanopositioning, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, etc.
Working principle:
P-770 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide high resolution and stability in closed loop operation (with PI electronics recommended below).
