P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner

Ordering Information:
P-770.00 Large Aperture XY PZT Flexure Stage, 200 µm, LVDT Sensor

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:
Models	P-770.00	Units	Notes
Active axes	X,Y
Open loop travel @ 0 to 100 V	200	µm ± 20 %	A2
Closed loop travel ³	200	µm	A5
Integrated feedback sensor	LVDT		B
Closed / open loop ** resolution £	10 / 2	nm	C1
Closed loop linearity (typ.)	0.1	%
Full range repeatability (typ.)	±20	nm	C3
Stiffness	0.2	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	50 / 10	N	D3
Max. (+/-) normal load	2	kg	D4
Electrical capacitance	14.4 / axis	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	12 / axis	µA/(Hz x µm)	F2
Unloaded resonant frequency	90	Hz ± 20 %	G2
Operating temperature range	- 20 to 80	° C	H2
Voltage connection ***	D		J1
Sensor connection ***	D		J2
Weight	2000	g ± 5 %
Body material	Al		L
Recommended Amplifier/Controller	H, F		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 6 mA drive current.

** Noise equivalent motion with E-503 amplifier.

*** Adapter cable with LEMO connectors for sensor and operating voltage included.