P-280 PZT Flexure NanoPositioners and Scanners
Ordering Information:
P-280.10 Piezo Flexure Stage, 30 µm
P-280.20 Piezo Flexure Stage, 50 µm
P-280.30 Piezo Flexure Stage, 100 µm
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
TECHNICAL DATA: Models
P-280.10
P-280.20
P-280.30
Units
Active axes
X
X
X
Open loop travel @ 0 to -1000 V
30
50
100
µm ± 20 %
A4
** Open loop resolution £
0.3
0.5
1
nm
C0
Stiffness
1.4
1.3
0.5
N/µm ± 20 %
D1
Push/pull force capacity
(in operating direction)50/50
50/50
50/50
N
D3
Max. (+/-) normal load
5
5
5
kg
D4
Tilt (Q Y, Q Z) (typ.)
3
7
9
µrad
E1
Lateral runout (Z) (typ.)
0.3
0.6
1.4
µm
E2
Electrical capacitance
20
27
70
nF ± 20 %
F1
* Dynamic operating current
coefficient (DOCC)0.83
0.68
0.88
µA/(Hz x µm)
F2
Unloaded resonant frequency
2200
1300
660
Hz ± 20 %
G2
Operating temperature range
- 40 to 80
- 40 to 80
- 40 to 80
° C
H2
Voltage connection
VH
VH
VH
J1
Weight (with cables)
37
56
92
g ± 5 %
Dimensionss
30.5 x 15 x 15
40.5 x 20 x 20
50.5 x 25 x 25
mm
Mounting grid distance R /
mounting screw size8.5 / M2.5
10 / M3
10 / M3
mm
Æ D x Æ d x t (see drawing)
5 x 2.7 x 2.7
6 x 3.4 x 4
6 x 3.4 x 4
mm
Body material
Al
Al
Al
L
Recommended Amplifier/Controller
B, I
B, I
B, I
M
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example (P-280.30): Sinusoidal scan of 30 µm at 10 Hz requires approximately 0.26 mA drive current.
** Noise equivalent motion with E-507 amplifier.