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P-290.00 Long Range Piezo Flexure Stage

• Displacement to 1000 µm
• Integrated Double Flexure Motion Amplifier
• Non-Magnetic Stainless Steel Design

P-290 is a unique, piezoelectrically driven stage providing 1000 µm stroke. It is designed for high resolution static and low dynamic positioning applications.

Application examples:
Wafer inspection, nanopositioning, medical analysis, biology, optics.

Working principle:
P-290 is a vertical positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked Piezo flexure tilt positioners (similar to P-287) machined of one solid piece of stainless steel. Each of the two tilt positioners is equipped with a high voltage piezoelectric stack actuator (0 to -1000 V) integrated into a zero stiction/friction wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.

Options:
P-705.00 positive polarity.