P-780 Miniature Piezo Flexure NanoPositioners

Ordering Information:
P-780.00 Miniature PZT Flexure Stage, 80 µm
P-780.20 Miniature PZT Flexure Stage, 80 µm, LVDT Sensor

See "PZT Control Electronics" section for our comprehen- sive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:
Models	P-780.00	P-780.20	Units	Notes
Active axes	X	X
Open loop travel @ 0 to 100 V	80	80	µm ± 20 %	A2
Closed loop travel ³	-	80	µm	A5
Integrated feedback sensor	-	LVDT		B
Closed / open loop ** resolution £	- / 1	10 / 1	nm	C1
Closed loop linearity (typ.)	-	0.1	%
Full range repeatability (typ.)	-	±20	nm	C3
Stiffness	1.5	1.5	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	50 / 5	50 / 5	N	D3
Max. (+/-) normal load	1	1	kg	D4
Lateral force limit	10	10	N	D5
Lateral runout (X/Y/Z) (typ.)	10	10	nm	E2
Electrical capacitance	3.6	3.6	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	5.6	5.6	µA/(Hz x µm)	F2
Unloaded resonant frequency	1000	1000	Hz ± 20 %	G2
Resonant frequency @ 100 g load	600	600	Hz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	VL	VL		J1
Sensor connection	-	L		J2
Weight (with cables)	150	170	g ± 5 %
Body material	N-S	N-S		L
Recommended Amplifier/Controller	G, C	H, E		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.7 mA drive current.

** Noise equivalent motion with E-503 amplifier.