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P-750 Piezo Flexure NanoPositioners and Scanners

• 1 nm Lateral Guiding Precision
• Resolution < 1 nm
• Fast Response
• 75 µm Range
• 10 kg Load Capacity

P-750 Piezo Flexure NanoPositioners are designed to provide motion in one axis with extremely small off-axis errors. They provide a positioning and scanning range up to 75 µm with settling time of a few milliseconds. Closed loop versions with integrated capacitive and LVDT (Linear Variable Differential Transformer) feedback sensors are offered for enhanced accuracy and repeatability.

Application examples:
Metrology, disk drive testing, wafer steppers, semiconductor equipment.

Working principle:
P-750 is equipped with a low voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated position feedback sensors (LVDT or capacitive) provide subnanometer resolution and stability in closed loop operation (with PI electronics recommended below).