P-750 Piezo Flexure NanoPositioners and Scanners

Ordering Information:
P-750.00 PZT Flexure Stage, 75 µm
P-750.10 PZT Flexure Stage, 75 µm, LVDT Sensor
P-750.20 PZT Flexure Stage, 75 µm, Capacitive Sensor

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control elec-tronics for computer and manual control.

TECHNICAL DATA:
Models	P-750.00	P-750.10	P-750.20	Units	Notes
Active axes	X	X	X
Open loop travel @ 0 to 100 V	75	75	75	µm ± 20 %	A2
Closed loop travel ³	75	75	75	µm	A5
Integrated feedback sensor	-	LVDT	capacitive		B
Closed / open loop ** resolution £	- / 1	10 / 1	1 / 1	nm	C1
Closed loop linearity (typ.)	-	0.1	0.03	%
Full range repeatability (typ.)	-	±20	±3	nm	C3
Stiffness	12	12	12	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	800 / 100	800 / 100	800 / 100	N	D3
Max. (+/-) normal load	10	10	10	kg	D4
Lateral force limit	50	50	50	N	D5
Tilt (Q Y, Q Z) (typ.)	10	10	10	µrad	E1
Lateral runout (Y) (typ.)	1	1	1	nm	E2
Electrical capacitance	9	9	9	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	15	15	15	µA/(Hz x µm)	F2
Unloaded resonant frequency	600	600	600	Hz ± 20 %	G2
Resonant frequency @ 1900 g load	250	250	250	Hz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	VL	VL	VL		J1
Sensor connection	-	L	2 x C		J2
Weight (with cables)	2500	2550	2550	g ± 5 %
Body material	N-S	N-S	N-S		L
Recommended Amplifier/Controller	G, C	H, E	H, F, L		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.5 mA drive current.

** Noise equivalent motion with E-503 amplifier.