P-611 NanoCubeTM Closed/Open Loop 3D NanoPositioning Systems
ORDERING INFORMATION:
P-611.3S NanoCube
(TM) XYZ Piezo Stage, 100 x 100 x 100 µm, Closed Loop
P-611.3O NanoCube
(TM) XYZ Piezo Stage, 100 x 100 x 100 µm, Open Loop
P-611.3SF NanoCube
(TM) XYZ Piezo Stage, 100 x 100 x 100 µm, Closed Loop, Fiber Adapter
Interface
P-611.3OF NanoCube
(TM) XYZ Piezo Stage, 100 x 100 x 100 µm, Open Loop, Fiber Adapter
Interface
| TECHNICAL DATA: | |||
| Models | P-611.3S / P-611.3O |
Units | Notes |
| Active axes | X,Y,Z | ||
| Open loop travel @ 0 to 100 V | 100 / axis | µm ± 20 % | A2 |
| Closed loop travel ³ | 100 / axis | µm | A5 |
| Integrated feedback sensor | Strain Gage | B | |
| Closed / open loop ** resolution £ | 2 / 1 | nm | C1 |
| Max. (+/-) normal load | 15 | N | D4 |
| Electrical capacitance | 1.8 / axis | µF ± 20 % | F1 |
| * Dynamic operating current coefficient (DOCC) | 2 / axis | µA/(Hz x µm) | F2 |
| Unloaded resonant frequency (X/Y/Z) | 350/200/200 | Hz ± 20 % | G2 |
| Operating temperature range | - 20 to 80 | ° C | H2 |
| Voltage connection *** | D-Sub-Special | ||
| Sensor connection *** | D-Sub-Special | ||
| Weight | 250 | g ± 5 % | |
| Body material | Steel/Al | L | |
| Recommended
Amplifier/Controller |
G, H, special | M | |
Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately
1 mA drive current.
** Noise equivalent
motion with E-503 amplifier.
*** Adapter
cable with LEMO connectors for sensor and operating
