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P-753 LISA Linear Piezo Stage Actuators

• Unique Design: Both Stage and Actuator
• Ultra-compact
• Precision Trajectory Control
• 0.05 nm Resolution
• Ultra-fast Response

The P-753 LISA Linear Piezo Stage Actuators are extremely compact and fast devices, providing a positioning and scanning range up to 38 µm with very fast settling time and extremely small rotational errors. P-753 stages combine the small Dimensionss of a Piezo stack actuator with the precise trajectory control of a flexure stage. They can be used both as linear actuators and as translation stages with extremely precise guiding systems. They are equipped with capacitive feedback sensors providing sub-nanometer resolution and stability.

Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures enhancing overall system throughput and stability.

Ask about our Mach ^TM Signal-Coprocessor for elimination of self-generated resonances anywhere in your equipment!

Application examples:
Disk drive testing, metrology, nanopositioning, scanning microscopy, fiber optics, scanning interferometry, bio-technology, micromanipulation etc.

Working principle:
P-753 stages are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated capacitive position feedback sensor provides subnanometer resolution and stability in closed loop operation (with PI electronics).